2005 KLA-Tencor Corp. SpectraCD 100

2005 KLA-Tencor Corp. SpectraCD 100

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Description

KLA-Tencor Corp. SpectraCD 100

Film Thickness Measurement System

Currently Configured for 300mm wafer size

MFG Date: 2005

EQUIPMENT DETAILS:

Process: METROTHK

Software Version: SUMMIT 5.01.03

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Specifications

ManufacturerKLA-Tencor Corp.
ModelSpectraCD 100
Year2005
ConditionUsed
Stock Numberem1229
WAFER SIZE300mm