Nikon AMI-3500

Nikon AMI-3500

EQUIPMENT DETAILS:

Tool is in a clean room.

Equipment Type: AMI-3500

Model:AMI3500

Main SWV：Ver5.30.059（SP3）

Light source：Deep UV Lamp,Metal halide Lamp

Wave Length：E-Line ～ 248nm,VIS

Minimum Line Width：30nm

PPH：160W/h

Broken Parts List:

Parts Name / Parts No./ "Missingor Brokn"/ Dismounted Date

-Bar code reader power supply unit / MGX03130/2S909-002 / Broken / 2016/8/3

-Bar code reader power supply unit / MGX03130/2S909-002 / Broken / 2016/8/3

-Bar code reader communication unit / MGX03130/2S909-003 / Broken / 2016/8/3

Macro-Defect