2014 KLA-Tencor Corp. Puma 9650

2014 KLA-Tencor Corp. Puma 9650

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Description

KLA-Tencor Corp. Puma 9650

Darkfield Inspection

Currently Configured for 300mm wafer size

MFG Date: Mar-2014

EQUIPMENT DETAILS:

1. 9650 system

1. TFIMS, Phoenix v2.0 S4 Cool

2. TFIMS PHX Ship Kit

3. Line Cond, 28kVA

4. 25 cassette HW and 300mm SW

5. FFU Analog

6. Includes DSW 16.3 Type 2 wafer (1 unit), DSW 065 wafer (1 unit) and Shiny

wafer (1 unit).

7. sL685

8. 300mm PSL Wafer Kit

9. Triple Loadport Info Pad Kit

10. Exhaust Down, PUMA

11. Ext Blower Cable,20m(65ft)

12. NFS Software

13. Sizing

14. FDC

15. Swagelok Fittings

16. GEM/SECS and HSMS

17. t system (High Speed Messaging System)

18. E84 Enablement for OHT with Three OHT Hokuyo PI/O Devices

19. E87 Carrier Management Services, E39 Object Services and E90 Substrate

Tracking

20. E40 Process Job Management and E94 Control Job Management

21. Three Omron Radio Frequency (RF) Carrier ID Readers

22. Painted Panel Light Curtain with Safety Skirt for Triple FIMS

23. SatServer Upgrade

24. Simulator

25. Impact

26. Remote Control Client

Specifications

ManufacturerKLA-Tencor Corp.
ModelPuma 9650
Year2014
ConditionUsed
Stock Numberem1238
WAFER SIZE300mm