2001 KLA-Tencor Corp. KLA-TENCOR DUAL OPEN HANDLER

2001 KLA-Tencor Corp. KLA-TENCOR DUAL OPEN HANDLER

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Description

KLA-Tencor Corp. AIT XP

Parts/Options

Currently Configured for 200mm wafer size

MFG Date: 2001

EQUIPMENT DETAILS:

(1) KLA-Tencor 200mm

(2) New Handler

• Currently configured for 200mm (8”) wafer sizes

• MFG Date: 2001

• CE Marked

• Cassette Interface:

200mm

• Robot: Ascenx Technologies: P/N 0236780-000

KLA-Tencor AIT P/N: 0235780-000

• Controller: Brooks Automation: P/N 6-0001-0258-SP; S/N 1107che10253

• Aligner: Brooks Automation: P/N 6-0001-0143-SP; S/N 1107che11669

KLA-Tencor AIT P/N: 505369

Specifications

ManufacturerKLA-Tencor Corp.
ModelKLA-TENCOR DUAL OPEN HANDLER
Year2001
ConditionUsed
Stock Numberem1241
WAFER SIZE200mm