RF Power Generator Unit

RF Power Generator Unit

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Description

Power generator cabinet unit.


Kyoto Denkiki KDS-30350 DC Power Supply X3,

 

Pearl Kogyo LP-150-800KBL LF / RF Power Generator X1

 

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Hitachi MCCB51 ELB Unit M-511E Etcher X1

 

Pearl Kogyo ZDK-921H PF/VPP Controller. X1

 

Daihen ES7 RF Power Generator X1

 

Hitachi: Electro-Static Chuck p/s dc-1001 x1

 

  


Specifications

ConditionUsed
Stock NumberGOD220720203
WAFER SIZE200mm