Axcelis GSD/HE/VHE Parts
Axcelis GSD/HE/VHE Parts
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Description
11002510 Selectable aperture faraday
1181634/4 Variable aperture electrode
11031510 3 Axis Manipulator
1181838 Faraday Flag Resolver HE
1190160 Plasma Shower Gun Assembly
1183280 secondary Electron Shower
Specifications
| Manufacturer | Axcelis |
| Model | GSD/HE/VHE Parts |
| Condition | Used |
| Stock Number | GOD23082023720223454 |