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Axcelis GSD/HE/VHE Parts

Axcelis GSD/HE/VHE Parts

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Description

11002510 Selectable aperture faraday

1181634/4 Variable aperture electrode

11031510 3 Axis Manipulator

1181838 Faraday Flag Resolver HE

1190160 Plasma Shower Gun Assembly

1183280 secondary Electron Shower


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Specifications

ManufacturerAxcelis
ModelGSD/HE/VHE Parts
ConditionUsed
Stock NumberGOD23082023720223454