2005 Nikon NSR-SF130 Stepper

Magnification 1/4 Reduction

Light-Source i-Line(365nm)

Resolution 0.28um

Variable Lens NA 0.50~0.62 Viriable

Exposure Filed Size 25mm * 33mm

Lens Adjust PIEZO(3Axis *5)

PC System Hardware Type DS15A

Reticle Size 5 inch / 6 inch 6 inch

Wafer Size 8 inch / 12 inch 12inch (300mm)

Reticle Microscope Variable / Fixed Variable

LSA Yes

FIA Yes

LIA No

Illumination Power Source LAMP 5.0kW

Wafer Stage Yes

Reticle Stage Yes

Focus System Single / Multi Focus Multi

Leveling System Normal / Table Table Leveling(VCM)

Type1 / Type2 / Type3 Type3

Wafer OF / Notch Type Notch

Wafer Size 12 inch (300mm)

Wafer Cassette 1 Cassette

Wafer IN-Line Front In-line(FOUP)

Wafer PRE-Align Type NC PRE2

Normal / SMIF Type Normal Type

Library / SLOT 3 Library

Barder Reader Yes

Particle Checker Yes

Type Normal(Right)

Cable Length Normal

Signal Tower 3 Color / 4 Color Type No

Temp Controller SENDAI

Model S52

S/N S521492305

Vintage 2005. 02

Air Conditioner ASAHI

Model N6E-A

S/N N6E1432303

Vintage 2005. 02

Power Single / CVCF NEMA NEMA1, 2

FOUP Front In-line

TRANSE POWER UNIT(NEMA) Sub Fab

Lamp Cooling Unit Sub Fab

NSR-130 Condition FAB(Clean Room) Turn off after initailize