1997 KLA Surfscan 6220

KLA-Tencor

Equipment Model: Surfscan 6220

Type: Defect Inspection System

Wafer Size: 2", 3", 4", 6", 8"

Equipment Configuration: - Windows 98 SE

- Software Version 4.2

- Previously refurbished in 2016

- Laser replaced in March of 2020

- Last PM performed August of 2023