2004 KLA- Tencor Surfscan SP 1 DLS Unpatterened Surface Inspection

- Refurbished

- 0.050 um Defect Sensitivity on Polished Bare Silicon

- Enhanced Rough Film Sensitivity

- Already upgraded with ENH SS laser

- Defect Map and Histogram with Zoom

- RTDC (Real Time Defect Classification)

- Map to Map

- Operator Interface

- Blower Unit

2004 Vintage

The tool is complete and in working order