TEL FORMULA ALD HIGH-K 3 Sets for sale

Tube Material: Quartz

Boat Material: Quartz

Production wafeRs: 50

Pressure control: APC Valve 

Process Gas: TEMAZ(F.S:1.0sccm),ZAC(F.S:1.0sccm),TMA(F.S:300sccm),O3(F.S:20slm,300g/m3),N2,OCTANE

Vaporizer Maker:STEC(TMA,ZAC,TEMAZ)

Vaporizer TYPE:LSC-F530(TMA),TL-2011(ZAC,TEMAZ)

MFC Maker: STEC

MFC Model: Z500series

Process Temp: 200-300deg

HD included