FEI Nova NanoSEM 450 SEM

Type: SEM

Wafer Size: 

Equipment Configuration: - 1-30 kV (500 volts possible); 50 volts possible using beam deceleration

- Immersion lens

- NavCam (navigation camera) and infrared CCD camera

- Plasma cleaner

- Cold finger for improved vacuum levels

- Quick Loader and accompanying sample sledges

- Manual User Interface (knob set) (no joystick)

Stage:

- 110 mm x 110 mm stage navigation

- Tilt: -15 to 54 degrees

- Eucentric position, working distance at 5 mm

- Z-range: 0-25 mm

- xT microscope Control Software, running on Windows XP (including computer, mouse, keyboard, monitor, and table)

- Edwards nXDS10i scroll pump and turbomolecular pump

- Haskris water chiller

Detectors:

- Everhart-Thornley detector

- Through-lens detector

- Retractable concentric backscatter detector

- Low-vacuum helix detector

- Special low vacuum detector

- Beam deceleration capabilities

- External fast beam blanker compatible with electron-beam lithography attachments