March PX500
March PX500
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Description
March PX500 plasma asher with Advanced Energy RFX-600 13.56mhz Rf generator
Advanced Energy RFX600 13.56mhz RF power supply
1 ground and 1 powered shelf
Leybold vacuum pump
Specifications
| Manufacturer | March |
| Model | PX500 |
| Condition | Used |
| Stock Number | EM941 |