Solitec 5110C
Solitec 5110C
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Description
Solitec 5110C photoresist coater for maximum 9in diameter substrate
single chuck coater for resist coatings
2Â photoresist pumps
max 9" wafer or 6" square substrate
Specifications
| Manufacturer | Solitec |
| Model | 5110C |
| Condition | Used |
| Stock Number | em968 |