OAI model 5000

Contact us for price

orCall +353 (0) 87 192 1110

Description

OAI model 5000 mask aligner configured with 6 inch tooling

OAI Model 5000 Mask Aligner consisting of:


- Model: 5008

- Type: 5008-068057

- Top Side Alignment

- Manual Wafer Load or Cassette to Cassette Handling

- Can be operated in either manual or automatic mode

- Sub-Micron Resolution in Contact Mode

- Better than 5um Resolution in Proximity Mode

- Wafer Size: Up to 6"/150mm capable (see tooling below)

- Dual Field CCTV Alignment with Motorized X, Y Illumination

- Variable Intensity

- Objectives: 5x or 10x

- Cognex Vision System

- Dual Focus w/zoom capability

- Auto Alignment

- Auto Proximity

- Pre-Alignment

- X, Y, & Theta motion

- Version 2.0.1 Software

- Lamp: 500 watt DUV

- Power Supply: 500W, OAI (RPS) Model 2105C2 with constant power/constant intensity

- Operations Manual for OAI 5000 Mask Aligner

- Fully reconditioned by trained service technicians prior to shipment.


Extensive Tooling Set Included as follows:


Mask Holders included:


- 7" x 7" Square


Vacuum Chucks included:


- 6" Round Chuck


Specifications

ManufacturerOAI
Modelmodel 5000
ConditionUsed
Stock Numberem970