2006 Intest Thermal with TPO3010B Controller

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Intest Thermal NEW 200mm heated chuck with TPO3010B Controller 15C to 200C

NEW 200mm Au plated water cooled thermal chuck with 3 vacuum rings 

temperature range 15C to 200C

TPO 3010B temperature controller with integrated heat exchanger for fast cool down


Outstanding Features:

  • Wide Temperature range: 0° to +200°C
  • DC Control System minimizes electrical noise
  • Temperature Stability :±0.1°C
  • Temperature Accuracy: ±0.5°C calibrated against transfer standard
  • Advanced ThermoChuck Design:
  • Low stray capacitance and high electrical resistance to ground: Surface Electrical Isolation: >109 ohms at 500 VDC between surface and ground at +25°C ; higher isolation configurations are available
  • Superior chuck temperature uniformity: ±0.5°C or ±0.5% of set temperature
  • Guarded ( low leakage) chuck configurations are optional


Standard Features:

  • IEEE-488 or RS232 remote interface
  • Proven high reliability
  • ThermoChuck interfaces to most major standard and automatic wafer probing stations, laser trimmers and inspection stations
  • No Liquid Nitrogen or CO2 is required for cooling.
  • HCFC-free and CFC-free
  • Certified  Compliant  



  • Thermal cycling and steady- state thermal testing of wafers, hybrids and other flat devices from 0°C to +200°C
  • Moisture-free cold testing of wafers to 0°C with Controlled Environment Enclosure
  • Low noise test applications
  • High isolation and guarded ( low leakage) applications
  • Thermal characterization of standard and high power devices


ModelThermal with TPO3010B Controller
Stock Numberem1000