Karl Suss MJB3 Mask Aligner

Mask aligner with vacuum contact, proximity or soft contact alignment modes.

365 to 400nm spectral range at up to 350W.

High precision X,Y, Theta alignment stage.

Normal field microscope.

Wafer size from small pieces to 3 in. dia.

110V, 60 Hz.

Ask sales person for available chucks and mask holders.