2021 Edwards iH1000 Dry Pump

Rebuild by Edwards, In Original OEM Packaging

OEM: Edwards

Model: iH1000

Code No.: NRY1VK100

Weight; 450kg

Serial: 56056268

Vintage: 2021

Inverter: 50Hz Dual Inverter

Voltage: 208V

Weight 430kg

Pumping Speed 950 m3/h

Ultimate Pressure 3 x 10-2 mbar

Edwards iH1000 Semiconductor Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Features And Benefits

• low cost of ownership

• optimised footprint

• high reliability for difficult processes

• specifically designed for high-throughput applications

• corrosion resistant materials allow pumping of corrosive gases

• higher operating temperatures prevent gas condensation

• absence of greased bearings eliminates need for intervention

• one-piece shaft eliminates need for motor coupling

Specification

Peak Speed:

• 950 m³/h
• 560 CFM
• 16,670 L/min

Ultimate Vacuum:

• 2 × 10⁻³ mbar
• 2 × 10⁻¹ Pa

Typical Shaft Seal Nitrogen Flow:

• 4 SLM

Inlet Connection:

• ISO100

Outlet Connection:

• NW40

Typical Cooling Water Flow (at 15 psi pressure drop):

• 240 L/h
• 4 L/min

Weight:

• 430 kg

Power Input at Ultimate Pressure:

• 3.8 kW

Rated Motor Power:

• 6.1 kW

Oil Capacity:

• 1.48 L

Applications

• load lock • transfer • metrology • lithography • PVD process • PVD

pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal

etch • implant source • HPD CVD • RTP • SACVD • MOCVD

• PECVD • LPCVD • ALD