2004 EVG 620 TB Manual Mask Aligner

2004 EVG 620 TB Manual Mask Aligner

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Description

Topside Alignment (TSA)

Backside Alignment (BSA)

Manual Handling

Manual Controlled Stage

Up to 6"/150mm Wafer Capable (with correct tooling)

Objectives (10x top and backside)

Vacuum Chuck for 6” wafers and 4" wafers

Maskholder for 7” Masks and 5" Masks

Mask Load Frames 7” and 5"

Tooling Tray

Uniformity Test Plate

EVG 620 offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes

Tooling Exchanges are Quick, Simple and can be Performed Within Minutes

Lamphouse: 1000W Lamphouse Optional 500W / 350W Or LED Upgrade Upon Request

Exposure Optics: Type C, 350nm - 450nm, Broadband

Microsoft Windows based User Interface

System PC, Keyboard, Cables

PDF Manual for EVG 620

Specifications

ManufacturerEVG
Model620 TB Manual Mask Aligner
Year2004
ConditionRefurbished
Stock NumberOD81020