Ebara EV-M502N Dry Vacuum Pump

• 2 sets available

• Refurbished by Ebara in 2023

• One is Copper the other is non-copper

• SPN: 202254-151-DR
• IPN:633017225

• Both Crated and barrier bagged, ready for shipping.

Ebara EV-M502N Dry Vacuum Pump

The Model EV-M502N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.

Typical applications for EV-M dry pumps include high load applications such as Atomic Layer Deposition (ALD), a variety of etch and CVD processes and harsher TEOS processes that require the best vacuum performance and optimum uptime.

Pumping Speed (60 Hz): 50,000 l/min

Features

• Oil-Free
• Low Energy Consumption: High Performance Brushless DC Motors
• Compact/Lightweight Small Footprint
• Various Pump Configurations According to Process Applications
• Low Cost of Ownership [Power, N2, Water, Footprint, Volume, Weight]
• Environmental-Responsive High Torque Motor
• High-Temperature Operation Control
• Advanced Warning & Alarm Data Storage Capability
• Advanced Sensing Function Reduces Product Down Time
• Identical Pumping Performance Regardless of Frequency (50/60 Hz)
• High Thermal Profile & NiResist Construction Material

Applications

• Atomic Layer Deposition (ALD)
• Chemical Vapor Deposition (CVD) Processes Including LPCVD, HDP-CVD, SACVD & PE-CVD
• Etching Process Including Nitride & Oxide
• Rapid Thermal Processing (RTP)
• TEOS Processes

Specifications - Model EV-M502N

• Pumping Speed: 50,000 L/min
• Ultimate Pressure: 5 Pa
• Connection - Gas Inlet: ISO160
• Connection - Gas Outlet: NW40
• Approx. Power at Ultimate Pressure: 2.1 kW
• Cooling Water Flow Rate: 5 ~ 8 L/mi
• Cooling Water Temperature: Max. 30°
• N₂ Gas Approx. Flow Rate: 28 ~ 33 Pa•m³/s
• Power Supply:
• 3Phase / 200–220V / 60Hz
• Power Capacity: 7.1 kVA
• Weight: 500 kg