2008 AMAT CENTURA DPS 11 300mm

Condition: As is

Process:metal etcher 12"

Main frame type:centura AP

Factory interface:

Description

Qty

Conduction

Loader

1

Three port loader with Kawasaki ATM Robot

Mainframe

1

With VHP Robot

Chamber Unit 1

1

Missing PCB & Turbo Pump

Chamber Unit 2

1

Missing PCB & Turbo Pump

Chamber Unit 3

1

Missing Turbo Pump

Main Power Rack

1

Complect

Control Monitor

2

Complect