300mm

193nm (ArF) Scanner

Lithography Equipment

Asset HDD not included

· Cymer XLA-165 45 W, 4kHz laser

· 4 FOUP Loadports

· Projection Lens, The Starlith, Aerial E illumination system, Quasar illumination module, Beam Delivery system

· Alignment System

o Wafer alignment using ATHENA

o Reticle BLUE alignment

o ATHENA narrow marks

o TOP 1 and TOP 2

· Lot streaming, Scanning stages, Wafer handling, Exposure chucks, Lot overhead reduction

· Focus control and field by field leveling, Focus Spot Monitoring, CD-FEDC, LS MATCH2

· Reticle shape correction

· System calibration and image quality control, in-situ metrology (ILIAS, SAMOS), Lithoguide, Pupicom, Dosemapper

· UNIX/SUN Architecture for user interface

· Reticle management, reticle error compensation

· DOE Low Sigma 193

· Aux Port 300mm FOUP/25 wafer

· IRIS for Twinscan 6 Inch

· Integrated reticle library

· Reticle CIDRW ASYST

· 24 Character barcode

· Foup Lock-Out System

· DOE Multipole

· Universal Reticle chuck/stage

· Beam analysis module

· EFESE

· PPD Iris Twinscan

· Water cooling for electronics cabinet

· Software version 4.0.0 or newer

· Inline left or right configuration available

· Additional information available upon request.

ASML TWINSCAN XT:1400F