Varian E500 EHP Medium Current Implanter

Applied Materials E500 EHP High Current Ion Implanter

Manufacturer: Applied Materials (AMAT)

Model: E500 EHP

General Information

• Original OEM Tool
• Complete System
• Currently Installed at: Production Cleanroom (buyer pays deinstall, rig and crate)
• Maintenance Status: Properly Maintained
• Known Damage/Defects: None Reported
• Manuals Included: No
• Crated: No
• Date of First Use: N/A

Configuration & Upgrades

• Thin Wafer Handling Kit
• Hydrogen Implant Capability
• LX Upgrade Package
• Windows 7 Operating System

Process Capability

• Wafer Size: 200 mm (8")
• Optimized for Thin Taiko Wafer Processing
• Suitable for Hydrogen Implant Applications

Consumables

• Source Assembly (Consumable)
• Electrode Components (Consumable)

Tool History

• Sourced from IR Singapore
• No Refurbishment Performed
• No Significant System Failures Reported Within the Last Three Years

Contamination History

• BF3
• H2

Additional Information

• No fab-Specific Customizations Reported
• Suitable for 8-inch thin wafer manufacturing applications requiring hydrogen implantation and advanced wafer handling capabilities.