Kokusai Vertron-V(S2) DD-835V

Wafer Size (inches):8  

Install Type:Stand Alone

Original Ship Date:2010.9

Software Version:V4.62.02

System Controller:CX3000

Date of Last PM:2020.12

Is System On-Line?:No

Off-Line Date (if applicable):2020.12

Electrical Requirements:110V/480V

SECS/GEM:Yes  

OEM Audit Available? Yes  

Decontamination Report Exists? No

Can Produce Wafers AS IS? No

Any Known Field Modifications? No

All Cables Present? Yes

Kokusai Model Number:DD-835V-8BL2 (V5S2)

Kokusai Process Name: C_ALLOY

Process Temperature:200

FTP heater:No  

Rapid Cooling Unit:No

Heater Type:D4EX10806

Number of Zones:4

Temperature Controller Model:CQ1600

N2 Purge System:Yes 

Signal Lamp Tower:Yes

Bolt-On-SMIF:No

Integrated SMIF:No

Clean Room Manuals:No

Standard Manuals:No

List all gases used below:H2