2016 LAM SEZ SP304

Consisting of the main unit, 3 chemical cabinets and sub-equipment

Description SEZ 304

Wafer Size Range   Minimum 150 mm  Maximum 300 mm  Set Size 300 mm

Number of Robots 1

Position 1   Tank Material PVDF

Position 2   Tank Material PVDF

Position 3   Tank Material PVDF

Position 4   Tank Material PVDF

Automatic Wafer Transfer YES

Controller Type Microprocessor Controller Type

Other Information 

The system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!).

Inline heater for media and DI

Main unit: 12-inch system with handler/gripper with flip option; Pinchuck

Intermediate tanks with Trebor pumps

Levitronix flow meters for heater flow sometimes cause problems

FFU was converted to a different controller/fan (see photos)

Chemistry cabinets:

Cabinet 1: Main tank (40L) with buffer tank and buffer function

Cabinet 2: Main tank (40L) with buffer tank and buffer function

Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function

The chemistry computer motherboard was replaced with a different one

A weld on the drain in Chemistry Cabinet 3 was repaired

Year of Manufacture 2016

Condition Good

Power Requirements Other V   80.0 A

CE Marked YES