2006 AMAT EPI CENTURA

Software Ver: B6.50

CB1 Amps: 300A

Vita Controller

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

 Standard pneumatic waferlift

Center Finding System: OTF

Buffer robot: HP+

Piezocon sensor: No

VSB: Yes

Wide Body LL

Tool called "EPI39"

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 150 mm

Number of Chambers 3

Controller Type Other Controller Type

Cassette to Cassette YES

Year of Manufacture 2006

Condition Good