2000 AMAT Centura 5200 EPI 3x 200mm EPI Chambers

• The system underwent a complete refurbishment performed jointly by Fab and Applied Materials field service on site.
• Blower control upgrades were implemented across all three process chambers.
• Approximately 4 years ago, the entire gas cabinet was upgraded from a Legacy configuration to a Universal Gas Cabinet (UGC) by AMAT, at a cost of ~€0.5M.
• The facility is equipped with a proprietary motorized lift system (×3 units).

Chamber Configuration

Chamber 1

• White-body cassette configuration
• 1 × Standard EPI process chamber
• 2 × Poly chambers
• VITA controller
• 3 × FSE-designed motorized rotation/lift assemblies
• New, upgraded blower controls

Chamber 2

• White-body cassette configuration
• 1 × Standard EPI process chamber
• 2 × Poly chambers
• VITA controller
• 3 × FSE-designed motorized rotation/lift assemblies
• New, upgraded blower controls

Chamber 3

• White-body cassette configuration
• 1 × Standard EPI process chamber
• 2 × Poly chambers
• VITA controller
• 3 × FSE-designed motorized rotation/lift assemblies
• New, upgraded blower controls