Alcatel ATH-400M Turbo Pump With ACT 600M Controller

Refurbished

***Controller included

2" and 1" flanges

• hybrid magnetically levitated turbo pumps

• magnetic bearing is frictionless & doesn't require grease

• maintenance free on clean processes

• best performance to size ratio

• low cost of ownership

• high throughput at high inlet pressure

Applications:

• glass coating • micro machining systems • research & development

• electron microscopy • space simulation chambers • particle accelerators • semiconductor processes (etch, CVD, ion implant)

• coating & thin films deposition • ion milling • ion beam rectification

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