ASM Epsilon E2000 Refurbished

Refurbished to exceed OEM specs with upgrades tailored to your needs

from Controller enhancements to software and process related improvements

• System hand: Left hand for 200mm, Right hand for 150mm available,
• Maint Console: Mini Maint
• CPU: 68040
• Software Ver: 7.65
• RP/ATM:RP
• Vacuum load lock: Ask
• RP Orientation: Bottom feed
• Gas Panel orientation: Top Feed
• TCS Mini Bubbler: 10L LPE
• Gas Detection: Gastec H2/HCL
• Temp Controller: Foxboro