2000 Karl Suss MicroTec MA6 BA6 for TSA BSA

It’s in Working Condition.

It’s complete with HDD and Software included.

Wafer Size: Small Pieces up to 6”/150mm Diameter Wafers.

Vintage : 2000.

Suss DVM6 Microscope

UV400 Optics (for 365nm and 405nm exposure)

Includes 5x, 10x, 20x objectives

Gen2 CIC Power Supply

350W Lamphouse

Capable of Soft, Hard, and Vacuum Contacts (depending on tooling)

1 Chuck included

1 Maskholder included

Vibration Isolation Table (for Suss MA6)

System Power: 230V, 50/60 Hz

Operations Manual for Suss MA6 Mask Aligner