1997 Nikon NSR-2205i11D

Chamber Type:Sendai S09

Altitude: Sea Level

Lens type:5IB5

Resolution:0.35

Computer type: Vax Computer 4000/90

Expansion: 3.5inch Floppy, Dat Tape and External Hard Drive

MCSV 2.16A

OCSV 2.18A

Tool 2.42A

Basekit:BAE7_101-9809A

Reticle size: 6 inch

Wafer size: 8 inch Notch ( 6 O'clock Load position)

Illuminator type:1750 Watt

Shrinc: No

Movable NA: 0.50 to 0.63

LLTC:Yes

Reticle Libraries:1

PPD:Yes

Bar code Reader:Yes

Wafer Loader Indexers:2

Wafer Loader Type: Type 2

Wafer Loader Prealignment 2: Yes

FIA:Yes

LSA:Yes

SRA Yes

VRA:Yes

FC2:Yes

Chip Levelling: Yes

Auto Focus 5 Point: Yes

Ceramic Chuck Type: 3 Pin Ring Chuck