1999 Eaton NV GSD HE

Eoton NV GSD HE Ion Implanter, 8"

Its already decommissioned and in storage

- Wafer Size: Originally 6", converted to 8"

- Power Supply: 3-Phase, 480 VAC, 60 Hz

- Full Load Current: 99 A

- Power Rating: 82 kVA

- Input Breaker: 150 A

- Maximum Interrupt Capacity: 14 kA

- Beam Energy: 1 MeV

- Beam Current: 1 mA

De-facilitation / Safety Preparation

- Hazardous gas lines purged and prepared

- Hazardous gas lines cut and capped

- Hazardous chemical supply lines flushed and capped

- All chemicals and liquids removed

- Cleaning PMs performed

- FMS wires terminated

- Non-hazardous gases/liquids terminated

- Waste lines cut and capped

- Exhaust ducts removed and wrapped

- Electrical de-facilitation completed

- All openings properly capped

- Interior and exterior surfaces cleaned

Major Components

- End Station

- Beam Line

- Source Terminal

- Source Housing

- Analyzer

- Power racks (3)

- Gas Box: Argon, Arsine, Phosphine

- PC & Monitor Rack

- SMIF Interface

- Top Panels: 1 & 2

- Bottom Plate

Vacuum & Cooling Equipment

- Cryo Pumps: CTI On-Board 250F, CTI On-Board 10, CTI On-Board 8

- Compressor: CTI 9600 (2)

- Turbo Pump: Leybold 75 M

- Chillers: Affinity RWA-012J-BE03CB, Affinity CWA-200LM-015CBD

Palletized Items

- End Station Door

- Terminal Door, Hoses, Cables

- Top Plate

- Generators, Stack

- Beam Door

- Door, Filter

- Lamp, Filter

- Compressor

- Manuals, Accessories, Misc. Parts

1999 Vintage