Karl Suss MJB3 Aligner

Karl Suss MJB3 Aligner

Working condition

Contact 1:1 aligner

IR capability (back side alignment)

Approximate exposure intensity: 14.5 mW/cm2 at 365 nm, 25 mW/cm2 at 405 nm

Substrate size up to 3”

Mask size 4”

Line/space resolution 2.5 microns

Aligner performs in hard contact/soft contact and vacuum mode