2013 Suss Microtec Gamma
2013 Suss Microtec Gamma
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Description
Suss Microtec Gamma coater x2
- Year built: November 2015
- 2-bowl coater (dual resist coating pots)
- Hot plate stack (bake plates)
- Cold plate stack (cooling plates)
- Contactless centering (non-contact wafer alignment)
- SUSS CPD (spin develop module)
- Sankyo dual-arm robot
- 4-station I/O (four load/unload ports)
- Year built: November 2013
- 2-bowl coater (dual resist coating pots)
- Hot plate stack (bake plates)
- Cold plate stack (cooling plates)
- Contactless centering (non-contact wafer alignment)
- SUSS CPD (spin developer)
- Sankyo dual-arm robot
- 4 load ports / I/O stations
Specifications
| Manufacturer | Suss Microtec |
| Model | Gamma |
| Year | 2013 |
| Condition | Used |
| Stock Number | BM6117 |