2007 Ulvac Entron W300 PVD
2007 Ulvac Entron W300 PVD
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Description
EFEM/2VTM Core
1x NOR-Co ch.
1x SIS-TTN ch.
1x ALN-Degas
1x NOR-WSi ch.
1x NOR-WWN ch.
2x Chiller
CHAMBER
Specifications
| Manufacturer | Ulvac |
| Model | Entron W300 PVD |
| Year | 2007 |
| Condition | Used |
| Stock Number | OD260121 |