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AMAT P5000 2 Chamber Oxide system

AMAT P5000 2 Chamber Oxide system

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Available quantity:1

Description

No generator & ac rack. 

Boards are missing.

M chuck type (not esc type).

Specifications

ManufacturerAMAT
ModelP5000 2 Chamber Oxide system
ConditionUsed
Stock NumberGOD28012021
WAFER SIZE150mm