AMAT Centura5200 WxZ 3 Chamber as is tool

6inch Centura5200 Phase II WxZ 3 Chamber As-is Tool

Narrowbody Loadlock A,B

Ch#E Multi Cool Down

Ch#A,B,D WxZ Chamber (Heater Type , RF Match)

Seriplex Type Gas Panel (Top feed)

Buffer HP Robot

Cable Length 25ft

System Controller is Power On Condition.