1997 Canon FPA-3000EX5

Status: Crated

Condition: Working condition at time deinstall.

Laser: Cymer ELS-5300 for both.

Wafer Size:200Mm

Tool ID: PG4EX5

• IUC data last collected: 8 May 2023

• IUC Uniformity NA/Sigma (54/60): 5466

• IUC Distribution NA/Sigma (54/60): 1.472

• IUC Uniformity NA/Sigma (50/70): Not available

• IUC Distribution NA/Sigma (50/70): Not available

• Software Version: V15.06A.06

• Serial Number:

Tool ID: PJ3EX5

• IUC data last collected: 5 May 2023

• IUC Uniformity NA/Sigma (54/60): 3512

• IUC Distribution NA/Sigma (54/60): 1.41

• IUC Uniformity NA/Sigma (50/70): Not available

• IUC Distribution NA/Sigma (50/70): Not available

• Software Version: V15.06A.06