2007 ACCRETECH Win-Win 50 - A5000, Hurricane

Serial Number: R00101GB-01

DOM: 2007

TSK Accretech

Huricane A5000

Brightfield Wafer Inspection

Tool status: warm idle

Software version: 7.1.0.0

Hardware Configuration (fab):

Main System: Main body(carrier stage)- 1

FOUP System(300mm): TDK- 2

Handler System: Wafer handing Robot- 1

Boat elevator- 0

Cassette loader- 0 

Process chms: Inspection unit- 1

Hardware Configuration (subfab/ auxiliary units)