2014 Adixen APR 4300, 300mm Pod Regenerator

2014 Adixen APR 4300, 300mm Pod Regenerator

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Description

Wafer Decontamination Tool

Software Version: V4.14a 

CIM: E84, SECS/GEM, GEM300

Hardware Configuration (fab):

Main system: Main mini environment Platform- 1

Main CPU & ACDC module- 1 

SMIF System: Asyst 2200 indexer built-In- 2 

Handler System: Wafer notch alignment with spatula- 1

Harmonic drive with wafer handler- 2

APM slider with shuttle arm- 1 

Process Chms: Ecthing with E-chuck- 1

Stripping- 1

Rinse/spin dry- 1 


Loadlock- 2

RF generator 1250W- 3

Auto WVDS controller- 1 

Hardware Configuration (subfab/ auxiliary units):

Remote AC box

Specifications

ManufacturerAdixen
ModelAPR 4300, 300mm Pod Regenerator
Year2014
ConditionUsed
Stock NumberBM134