2019 TEL CLEAN TRACK LITHIUS Pro Z Inspection

Wafer Inspection Equipment

Metrology Equipment

Date of Manufacture: 2019-01-01

Currently Configured for: 300mm

2 blocks interfaced: 1 carrier and 1 multi purpose block (WIS)

2 transfer robot arms: 1 carrier, 1 multi purpose

High speed Fork for CRA

Multi purpose forks: X1,X2 (Vac. function to backside of wafer)

Cassette Station Block (CSB)- Qty 1

4 FOUP design (25 wafer type)

Media Drive DVD-RW Drive

High Speed Fork for CRA

FFU

Key board

Sub-operating panel

Carrier ID reader OMROM

Ionizer

Multi-Purpose Block (MPB)- Qty 1

Integrated ACPB

MPB for WIS S/A

Vac forks

FFU

Transition Station (TRS)- Qty 32

Standard

Wafer Exchange- (WEX) Qty 2

Standard

Temporary Holding Stage- (THS) Qty 2

Standard

Integrated Metrology

Wafer intelligent scanner developer - (WISD) Qty 2

Chuck 84mm

WiseCam x2

WIS camera type-2

Wafer chipping

Sensitivity enhancement

Image light source(white LED)

MEBR

Process or Dedication Selection Features

Macro Defect Inspection Module (WISD)

Wafer Intelligent Scanner Developer- (WISD) Qty 2