2016 Bruker Contour GTX

Application: White Light 1095

Set up for 6“ wafers

Year of Manufacture: 2016

Provides the highest performing non-contact surface measurements for laboratory research and production process control.

Key features include full automation and a production interface, a large motorized XYZ stage, tip/tilt in the head, and an integral air isolation table. 

Full automation: Provides fastest, and easiest nanometer-scale measurements.

Customizable production interface: Delivers streamlined process workflows, automated mapping, and load measurement recipes.

Self- calibrating laser reference: Ensures best production metrology, repeatability and robustness.

Air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy and PDU, EMO, and vacuum systems for integration to modified vacuum chucks for autoloader end-effector compatibility.

The ContourGT-X motorized XY stage provides 12-inch encoded movement in the X and Y directions. The stage supports automated routines, such as multiple-point data collection, as well as stitching capability for large-area analyses. The 0.5 micron encoders provide reliable, repeatable automation and sample positioning. Sample positioning is made easy for operators by intuitive joystick and software interface controls.