AMAT Producer GT Chamber (Pre-Clean Siconi)
AMAT Producer GT Chamber (Pre-Clean Siconi)
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Description
Wafer size: 300mm
Process: SiCoNi RPS: FI20620-1 x2ea
RF Generator: APRX3013 AE
12"
Missing Parts(As far as we know) RF Generator with cover x1ea Lift Pin’s
Specifications
| Manufacturer | AMAT |
| Model | Producer GT Chamber (Pre-Clean Siconi) |
| Condition | Used |
| Stock Number | BM239 |