AMAT Producer GT Chamber (Pre-Clean Siconi)

AMAT Producer GT Chamber (Pre-Clean Siconi)

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Description

Wafer size: 300mm

Process: SiCoNi RPS: FI20620-1 x2ea

RF Generator: APRX3013 AE

12"



Missing Parts(As far as we know) RF Generator with cover x1ea Lift Pin’s

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Specifications

ManufacturerAMAT
ModelProducer GT Chamber (Pre-Clean Siconi)
ConditionUsed
Stock NumberBM239