2002 Axcelis GSD200E2 High Current Implanter

System Configuration

• Disk Drive: Direct Drive
• Dose Type: Regular
• Source Type: ELS4 IHC Source (without vaporizer)
• High Voltage Transformer: Dual oil-cooled transformers
• Cell Controller: 177 Cell Type
• Main Workstation: SUN Solaris AXI 3HE (special configuration)
• Secondary Workstation: SUN Sparc 5 workstation on cart with printer
• Software Version: 6.4.3 (license not included)
• Network: 24-port 100MB Ethernet with Cisco router kit
• Light Tower: Red / Yellow / Green status indicators (no buzzer)

Installed Options / Upgrades

• Accel High Voltage Probe installed
• HPES Upgrade installed (no further upgrades completed after HPES installation)
• Modified gas box frame for 6L bottles
• Modified plasma gun power supply installed (TDK)
• Minor custom modifications including interlocks

Operating Condition

This tool was fully operational in productive 24/7 manufacturing service until shutdown in March 2026. It was running across an energy range of 15kV to 160kV prior to decommissioning.

Condition Notes

• Slight cosmetic corrosion/rust spots on frame (visual only)
• Front cleanroom table missing
• 0.5L Xe plasma bottle holder missing
• Terminal water cover missing
• No manual set included
• No spare parts included

Items Not Included

• Roughing pumps
• Disk chiller
• Software license
• Manuals
• Spare parts

Availability

Available immediately

Shipment can commence approximately 8 weeks after receipt of payment, subject to completion of:

• Decontamination
• Professional dismantling
• Export packing

Timing may vary depending on external service provider availability.