Applied Materials AMAT Endura II Copper Barrier/Seed

Wafer size: 300mm

Asset HDD not included

Process: CU

Process TypeSIP Ti

Chamber position1,3

Shutter optionyes

chamber body (Al or SST)-SST

chamber body part number0242-33289

Slit valve seal (bonded or o-ring) Bonded

Slit Valve door part number0040-84391

Target vendor Nikko/Tosoh

Target No.TAG73

Bakeout/idle power (%) 40

DC Power supply(AE-MDX????)AE-Pinnacle

AMAT Part number Master0190-34650

AMAT Part number Slave0190-34650

Generator Size 20kw

Total DC (12 kwh,24kwh, etc)40kw

Bias Generator ENI - GHW12Z

AMAT Part number 0190-25529

Bias Generator Size1250w

Bias Generator Frequency13.56 Mhz

RF1 power cable P/N (bias)0190-02031

RF cable (match bax to PIB)0190-15905

Magnet rotation speed (rpm)65

Magnet typeSIP