2002 Brooks 300mm Wafer Transfer Module Mag 7
2002 Brooks 300mm Wafer Transfer Module Mag 7
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Description
Vintage 2002. Cluster tool : 1 x magnatran 7 vacuum brooks robot, 1 atmospheric brooks robot, vacuum gauges, 3 turbomolecular pump, 5 x gate valves….
Specifications
| Manufacturer | Brooks |
| Model | 300mm Wafer Transfer Module Mag 7 |
| Year | 2002 |
| Condition | Used |
| Stock Number | BM7076 |