Brooks 200mm Wafer Transfer Module 181600-0013 Mag 7

Brooks 200mm Wafer Transfer Module 181600-0013 Mag 7

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Description

Cluster tool 4 sides for 2 process chambers include : 1 Coolstation, 1 aligner 196869, 1 aligner controller 001-4130-15, 1 vacuum robot Magnatran 201600-48-0003, 1 Vacuum Cassette Elevator 188557, 1 Vacuum Cassette 169800-0041, 1 WTM Contoller 233832,and much more, contact us

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Specifications

ManufacturerBrooks
Model200mm Wafer Transfer Module 181600-0013 Mag 7
ConditionUsed
Stock NumberBM7077
WAFER SIZE200mm