2011 ASML YieldStar S-200B
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Description
Vintage: 2011
Wafer size: 300mm
A HARD DISK DRIVE will be removed from tool.
Laser (light source for measurement):LPPS
Lamp cooling method: Water cooling
Handler type: Spartan EFEM
Handler / Load port manufacturer: Brooks
Handler / Robot manufacturer: Brooks
Specifications
| Manufacturer | ASML |
| Model | YieldStar S-200B |
| Year | 2011 |
| Condition | Used |
| Stock Number | BM530 |