2022 Edwards EUV3050H / iXH3050H harsh vacuum pump

OEM: Edwards

Model: EUV3050H MK2 HV MM44 INT

AKA: iXH3050H configured for EUV scanners. It was intended for use with an ASML EUV Scanner.

SPN: NRY8RB000

Edwards EUV3050H MK2 HV MM44 INT Dry Vacuum Pump – EUV / ASML Configuration

Edwards EUV3050H MK2 high-capacity dry vacuum pump package, based on the Edwards iXH3050H platform and specifically configured for EUV process applications.

These units were originally intended for use with ASML EUV scanner installations at a Tier 1 fab in Europe in 2023 and are now available as surplus equipment.

The EUV3050H is designed for demanding semiconductor vacuum applications where high pumping capacity, process compatibility and reliable continuous operation are required. The EUV configuration includes application-specific hardware and configuration for EUV tool support rather than a standard iXH3050H process setup.

Key details:

• Manufacturer: Edwards
• Model: EUV3050H MK2 HV MM44 INT
• Platform: iXH3050H-derived EUV configuration
• Application: EUV semiconductor process / scanner support
• Originally intended for ASML EUV installation
• Condition: New, Surplus equipment
• Suitable for EUV fab installations, spares strategy, replacement or refurbishment programs

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Configuration and compatibility should be verified against the target ASML tool, facilities interface and Edwards specification before installation.