1995 LAM 4520I Rainbow
1995 LAM 4520I Rainbow
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Description
Refurbished in 2024 and have not been put into production operation since the refurbishment. The equipment is in excellent condition.
Rainbow 4520i
1995
150mm
gas: Ar, CHF3, CF4,SF6,N2, O2,NF3, He
+ Edwards TCU 40/80
Specifications
| Manufacturer | LAM |
| Model | 4520I Rainbow |
| Year | 1995 |
| Condition | Refurbished |
| Stock Number | BM7300 |