Edwards iGX600M MK5 SS

2018 Edwards iGX600M MK5 SS Dry Vacuum Pump — Edwards Refurbished in 2023

OEM: Edwards

Model: iGX600M MK5 SS

SPN: NR5151000

Serial Number: 180004425

Year: 2018

Refurbished: 2023 by Edwards

Condition: OEM Refurbished

Configuration: MK5 SS

Location: Ireland

Lead Time: In stock — available immediately after payment

Incoterms: EXW Ireland

Warranty: As Is

Price: Contact us for current pricing

Description

2018 Edwards iGX600M MK5 SS dry vacuum pump, professionally refurbished by Edwards in 2023.

The unit is in stock at our facility in Ireland and available immediately after cleared payment.

Edwards refurbishment documentation is included, providing supporting records for the OEM refurbishment completed in 2023.

Only one unit is available.

This pump provides an OEM-refurbished option for semiconductor facilities maintaining compatible Edwards vacuum installations.

Typical Applications

Typical applications can include:

• Semiconductor process vacuum systems
• Chemical vapour deposition (CVD)
• Plasma-enhanced CVD (PECVD)
• Etch process equipment
• Load lock and transfer chamber evacuation
• Vacuum chamber evacuation
• Backing vacuum applications
• Replacement or spare pump for compatible iGX600M installations

Process suitability depends on gas chemistry, operating conditions, and tool configuration. Buyers should confirm compatibility with their specific process.

Equipment Details

• Manufacturer: Edwards
• Model: iGX600M MK5 SS
• SPN: NR5151000
• Serial number: 180004425
• Manufacture year: 2018
• Equipment type: Dry vacuum pump
• Condition: OEM refurbished
• Refurbished by: Edwards
• Refurbishment year: 2023
• Configuration: MK5 SS
• Documentation: Edwards refurbishment documents included
• Quantity available: 1

Key Benefits

Refurbished by Edwards in 2023

The refurbishment was completed by the original equipment manufacturer, with supporting Edwards documentation included.

Available from stock

The pump is located in Ireland and available immediately after cleared payment.

Clear equipment identification

Model, SPN and serial number are provided to support technical and procurement review.

Fab support and replacement

Suitable for maintenance stock, replacement requirements, or compatible equipment support.

Commercial Terms

Quantity: 1 unit

Location: Ireland

Availability: In stock

Lead time: Immediately after payment

Incoterms: EXW Ireland

Warranty: As Is

Export packing: Available on request

Worldwide shipping: Can be arranged

Price: Available on request

Contact Tara Semiconductor Technology LTD for pricing